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摘 要
三菱清洗工艺流程中，手动将装有原料三菱的提篮放入上料位，机械手抓取提篮，按设定的程序将提篮转移到各个工艺槽中进行腐蚀或清洗，相关工艺槽具有加热超声，排液，温度检测，液位检测等功能，完成处理功能后，机械手将提篮转移至下料位，手动提取提篮，提篮在各个工艺槽中，通过加热器加热已经兑水过的清洗剂，从而清洗三菱上的各类污染物。这些可通过PLC控制来控制机械臂行走，机械臂把有三菱提篮放入各槽里进行清洗。本文介绍了PLC的结构和工作原理，概述了三菱清洗机的结构和工艺流程，对PLC在三菱清洗机控制上的应用可行性进行了探讨，对PLC控制三菱清洗机梯形图及程序进行了分析，对三菱清洗机采用PLC控制的优越性进行了总结。设备产品质量高，控制系统可靠性高，自动化水平高。随着PLC技术的不断发展，PLC在三菱清洗机的控制上将有更广阔的应用前景。
关键词：三菱清洗机; PLC; 梯形图; 程序; 控制
Abstract
Wafer cleaning process, the manual will be placed in the basket mounted on silicon raw material level, the robot crawling basket, according to the set of the program will be transferred to each craft basket tank for corrosion or cleaning processes associated with a heating tank ultrasound, drainage, temperature detection, level detection and other functions, after the completion of processing, the robot will be transferred to the next basket material level, manually extract the basket, basket in each process tank heater has been watered down by excessive cleaning agent thereby cleaning all types of contaminants on the wafer. These can be used to control the robot arm to walk through the PLC control, the robot arm to have a silicon wafer into the slots in the basket for cleaning. This paper describes the structure and working principle of PLC, an overview of the structure and process wafer cleaning machine PLC applications for feasibility in wafer cleaning machine control is discussed, for wafer cleaning machine PLC control ladder and procedures were analyzed for wafer cleaning machine adopts PLC control advantages are summarized. Equipment products of high quality, high reliability control system, high level of automation. With the continuous development of PLC technology, PLC control wafer cleaning machines will have a wider application.
Keywords: wafer cleaning machine; PLC; ladder; procedures; control
目 录
摘 要 I
Abstract II
前 言 1
第1章 概 述 2
1.1 PLC的由来 2
1.2 PLC的分类与特点 2
1.3 PLC的应用领域与发展趋势 3
1.4 PLC的结构和工作原理 3
1.5 PLC的工作方式 4
1.6 PLC应用系统的设计步骤 4
第2章 基于三菱PLC清洗机机械臂行走控制系统设计 6
2.1 三菱清洗机的介绍 6
2.2 PLC应用可行性及优越性 6
2.3 PLC控制清洗机的程序设计 7
2.3.1 PLC的选型 7
2.3.2 可编程控制器的输入与输出分配 7
2.3.3 梯形图与指令表 11
第3章 总结与展望 28
致 谢 29
参考文献 30
